12 January 2018

Intrinsic Compressive Stress in Polycrystalline Films is Localized at Edges of the Grain Boundaries

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The understanding of the origin of the intrinsic stress during the formation of polycrystalline thin films and coatings is a topic with deep technological implications, because residual intrinsic stress endures after the film is incorporated into a device. The accumulation of this stress under operating conditions causes the thermomechanical fatigue that is estimated to be responsible for 90% of mechanical failures in current devices.