12 January 2018

Intrinsic Compressive Stress in Polycrystalline Films is Localized at Edges of the Grain Boundaries


The understanding of the origin of the intrinsic stress during the formation of polycrystalline thin films and coatings is a topic with deep technological implications, because residual intrinsic stress endures after the film is incorporated into a device. The accumulation of this stress under operating conditions causes the thermomechanical fatigue that is estimated to be responsible for 90% of mechanical failures in current devices.